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News Release
March 23, 1999

ZYGO RECEIVES MAJOR OEM ORDER FOR MASK HANDLING SYSTEM

MIDDLEFIELD, CONNECTICUT (March 23, 1999)......Zygo Corporation (NASDAQ:ZIGO) today announced that it has received an order for seven automated mask handling systems from a major manufacturer of mask pattern generation equipment. ZYGO has delivered an alpha tool and one beta tool and is currently completing a second beta tool for this OEM customer. The AMHS system is an essential element of the customer's mask pattern generation tool. Commenting on this important order, Ahmad Akrami, vice president worldwide sales and service, stated, "ZYGO has been a leading supplier to the mask metrology market for many years. The AMHS and other automated tools are now allowing us to broaden our participation in the mask sector of the semiconductor market. Mask pattern generation tools are critically important enablers for semiconductor device production and our broader participation in this sector will be very rewarding."

Zygo Corporation designs, develops, manufactures, and markets high performance measurement and yield improvement instruments, systems, and accessories used in high technology industries. The Company is headquartered in Middlefield, Connecticut, and also has operations in Asslar, Germany; Longmont, Colorado; and in Newbury Park and Sunnyvale, California. ZYGO is traded on the Nasdaq National Market under the symbol ZIGO. Additional information on the Company is available on the Internet at www.zygo.com.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.


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