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News Release
June 8, 2000


MIDDLEFIELD, CONNECTICUT June 8, 2000…..Zygo Corporation (NASDAQ:ZIGO), today announced Vacuum Process Technology, Inc., Plymouth, Massachusetts, and Zygo Corporation, Middlefield, Connecticut, have formed a technology partnership for the development of advanced optical coating systems and processes. The new systems and processes will support Zygo Corporation's DWDM filter technology used in the optical telecommunications market as well as other advanced coating requirements.

Initial process development work will be conducted on behalf of the partnership at the Laboratory for Laser Energetics (LLE) at the University of Rochester under the direction of Douglas J. Smith, Group Leader - Optical Manufacturing. The process technology will later be transferred to a new ZYGO Coating Development Laboratory being constructed in VPT's expanded facility in Plymouth, Massachusetts.

"We are extremely pleased and excited to have formed this partnership with ZYGO," said Richard C. Eriksson, President and CEO of Vacuum Process Technology. The respective technical capabilities of VPT and ZYGO form an excellent team for the next generation of processes and equipment required to meet the growing needs of the photonics and telecom markets. "The experience and technical leadership of Doug Smith and his team at LLE will be an invaluable asset to this partnership," said J. Bruce Robinson, President and CEO of Zygo Corporation.

The LLE Optical Manufacturing Facility provides optical coatings to high power lasers for fusion research. Programs include the 30 kJ Omega Laser and the 1.8 MJ National Ignition Facility (NIF) now under construction in Livermore, California. These programs have some of the most stringent requirements for optical coatings in the industry, including high laser damage threshold, high uniformity, and excellent process control. Vacuum Process Technology, Incorporated designs and manufactures precision thin film vacuum deposition systems for optical and other functional applications. Information regarding VPT products may be found at www.vptec.com.

Zygo Corporation designs, develops, manufactures, and markets high performance measurement and yield improvement instruments, custom automation systems, and accessories used in high technology industries. The Company is headquartered in Middlefield, Connecticut, and also has operations in Asslar, Germany; Longmont, Colorado; and in Sunnyvale, California. ZYGO is traded on the Nasdaq National Market under the symbol ZIGO. Additional information on the Company is available on the Internet at www.zygo.com.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

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