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News Release
February 27, 2001

ZYGO CORPORATION DELIVERS MULTIPLE AWARD-WINNING MICROLUPITM SYSTEMS TO DIGITAL OPTICS CORPORATION

MIDDLEFIELD, CONNECTICUT February 27, 2001…..Zygo Corporation (NASDAQ:ZIGO), today announced the delivery of multiple MicroLUPITM metrology systems to Digital Optics Corporation, a manufacturer of Photonic ChipsTM for the telecom and datacom industries.

Winner of the Photonics Spectra Circle of Excellence Award 2001, and the Laser Focus World Commercial Technology Award 2001, the MicroLUPITM is a metrology system that provides automated, rapid, and precise 3D surface shape analysis of discrete or wafer-based micro-optic components.

"ZYGO's MicroLUPITM system provides us with critical feedback necessary to improve process yields and ensure product quality," commented William Francis, vice president of operations at Digital Optics Corporation. "We are thrilled to have ZYGO as a partner."

"We are pleased that an industry pioneer like Digital Optics has selected the MicroLUPITM to integrate into its Photonic ChipsÔ production line and look forward to helping them enhance their position in the datacom and telecom industries" added Brian Monti, ZYGO's vice president of worldwide sales and marketing.

A registration statement relating to the Company's common stock has been filed with the Securities and Exchange Commission but has not yet become effective. These securities may not be sold nor may offers to buy be accepted prior to the time the registration statement becomes effective. This press release shall not constitute an offer to sell or the solicitation of an offer to buy nor shall there be any sale of these securities in any state in which such offer, solicitation or sale would be unlawful prior to registration or qualification under the securities laws of any such state.

Zygo Corporation, headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical, and fiber optic assemblies, high performance instruments, and automation for the telecommunications, semiconductor, and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's (ZYGO's) current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.


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