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News Release
March 20, 2002

ZYGO TeraOptix Announces New Silicon Optical Bench Packaging Platform
ANAHEIM, Calif., Mar 20, 2002 (BUSINESS WIRE) -- ZYGO TeraOptix (NASDAQ:ZIGO), an innovative and emerging telecommunications sub-component and packaging supplier announced the availability of their new silicon optical bench and precision packaging solutions for optical telecommunications components.

These new products further extend ZYGO TeraOptix's telecommunications product capabilities to higher levels of component integration.

The new silicon optical bench provides a precision, flexible, scalable and automation-ready platform compatible with ZYGO TeraOptix's current microoptic subcomponent product offerings that enables low-cost multichannel and multifunction optical components and modules. ZYGO TeraOptix is now delivering silicon optical bench solutions to key customers.

"As component suppliers step up to address the challenges of building next generation products in high volume, it becomes obvious that traditional component integration strategies that rely on discrete subcomponents and manual assembly are not scalable," remarked John Berg, president of ZYGO TeraOptix. Mr. Berg added, "Our silicon optical bench provides the perfect scalable platform upon which a flexible product family can be developed and reliably produced in high volume."

ZYGO TeraOptix's precision packaging provides Telcordia compliant multi-channel hermetic sealed solutions for end user optical elements. Available on an OEM or private label basis, ZYGO TeraOptix has the capability to develop unique solutions for a wide range of components. The complete family of ZYGO TeraOptix products is on display at booth #6057 during the OFC conference.

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical, and fiber optic assemblies, high performance metrology instruments, and automation for the telecommunications, semiconductor, and industrial markets. Located in Westborough Massachusetts, ZYGO TeraOptix, a wholly owned subsidiary of the ZYGO Corporation, is a supplier of precision micro-optic subcomponents and packaging solutions for optical telecommunications.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

CONTACT:          ZYGO TeraOptix, Middlefield
                  Business Development and Marketing:
                  Frank Weiss, 860/655-3370
                  fweiss@zygoteraoptix.com
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