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News Release
September 29, 2005

ZYGO Announces Multiple Orders for Flat Panel Display Systems Incorporating the ONE SHOT™ Process Control System

MIDDLEFIELD, CT, Sep 29, 2005 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO), a worldwide supplier of optical metrology instruments, serving customers in the semiconductor capital equipment and industrial markets, announced today that it has received multiple orders for its ONE SHOT™ flat panel display process control system. The tools will be used for high-speed measurement and inspection of key color filter and TFT (Thin Film Transistor) features, improving throughput and performance of key TFT-LCD processes. The systems ordered will be used in G4-G8 fabs, with the latest orders specifically slated for G7.5 production.

"ZYGO is pleased with the growing flat panel customer acceptance of our latest generation of process control tools," said Brian Monti, Vice President and General Manager of ZYGO's Display Solutions Division. "ONE SHOT™ brings a thirty-percent improvement in inspection process time to the color filter and cell fabs, while the increased metrology performance helps improve product grading and yields in the highly competitive monitor and television display marketplace."

ONE SHOT™ makes use of ZYGO's patented optical metrology components and application-specific software for the flat panel industry. Product uses include color filter fab RGB inspection, cell fab One Drop Fill (ODF) process control, and TFT half-tone mask process review.

"The flat panel business sector is one of our important semiconductor initiatives and an area we have targeted for growth," said Bruce Robinson, CEO of Zygo Corporation. "The Company plans to continue to invest in technology that provides semiconductor application solutions that address our customers' metrology and inspection needs."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

All statements other than statements of historical fact included in this news release regarding the Company's financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending in the semiconductor industry, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on new product development, rapid technological and market change, international operations, dependence on proprietary technology and key personnel, length of the sales cycle, and environmental regulations. Further information on potential factors that could affect Zygo Corporation's business is described in the Company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended June 30, 2005.

For Further Information Call:
Walter J. Shephard
VP Finance, CFO, and Treasurer
Voice:  860 704-3955

SOURCE: Zygo Corporation

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