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News Release
April 3, 2006

Zygo Corporation Announces Front End Semiconductor Process Metrology Tool

MIDDLEFIELD, CT, Apr 03, 2006 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO), a leading worldwide optical metrology supplier, today announced its new front end semiconductor metrology tool, the Z3D 7000™, designed to meet the metrology challenges of semiconductor manufacturing processes at the 45nm node and beyond.

The Z3D 7000™ optical metrology tool performs high resolution surface topography mapping of semiconductor wafers at throughputs far exceeding those achievable with existing mechanical profiling techniques, such as atomic force microscopy. The Z3D 7000™ is ZYGO's first fully-automated, stand alone metrology tool built for semiconductor high-volume manufacturing process control. The tool is designed for emerging process control applications at multiple process steps, including lithography, etch, film deposition, and planarization. The Z3D's advanced scripting capability allows users to automate image analysis thereby extracting information about critical process control parameters in all three dimensions.

Robert Stoner, ZYGO's Vice President, Metrology, made the following comment, "ZYGO is committed to bringing its superior optical measurement technology to the front and back end semiconductor process control markets. The Z3D 7000™ builds on our recent success in the advanced chip packaging market with the CP300i. With its combination of sophisticated 200 and 300mm automation and advanced optical technology, it is also a platform for further semiconductor metrology products now under development."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on and timing of new product developments, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and stock price. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2005.

Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice:  860-704-3955
Contact via http://www.marketwire.com/mw/emailprcntct?id=FFAF36CE651C8BBD

SOURCE: Zygo Corporation

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