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News Release
September 12, 2006

Zygo Corporation Receives Multi-Million Dollar Commitment for Front End Semiconductor Process Metrology Tools

MIDDLEFIELD, CT, Sep 12, 2006 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO), a leading worldwide optical metrology supplier, today announced that it has received a follow-on order from a leading North American semiconductor manufacturer as part of a multi-million-dollar commitment to use ZYGO's Z3D 7000™ metrology tool for high volume manufacturing process control.

The Z3D 7000™ optical metrology tool performs high-resolution surface topography measurements on bare and patterned 200mm and 300mm semiconductor wafers. It provides high measurement precision at throughputs that exceed those achievable with existing mechanical profiling techniques, such as atomic force microscopy. The tool has been designed to meet the growing need for in-line etch, deposition, and planarization process metrology 45nm node and beyond. It is equipped with SEMI(R) compliant automation, ISO Class 2 certified clean hardware and meets all ergonomic and safety certifications needed for production line equipment.

Robert Stoner, ZYGO's Vice President, Metrology, made the following comment, "This commitment is a strong endorsement of our strategic product roadmap by an important customer. It is also a measure of our success in building a world-class team focused on the semiconductor process control market. We believe ZYGO's technology leadership will allow us to increase our market share of noncontact optical metrology into the semiconductor front end manufacturing process."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on and timing of new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and fluctuations in our stock price. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K, as amended, for the fiscal year ended June 30, 2005.

For Further Information Call:
Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice:  860-704-3955
Contact via http://www.marketwire.com/mw/emailprcntct?id=1599C8BA6229A4B0

SOURCE: Zygo Corporation



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