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News Release
September 21, 2006

Zygo Corporation Announces Z3D 7200™ Multifunctional Wafer Metrology and Inspection Tool

MIDDLEFIELD, CT, Sep 21, 2006 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO) today announced the release of its new Z3D 7200™ series multifunctional wafer metrology and inspection tool.

The Z3D 7200™ is the most recent addition to ZYGO's line of production-ready optical metrology tools. It is configured for bare wafer metrology in wafer and chip fabs. Like its cousin, the Z3D 7000™, the new tool performs high-resolution surface topography measurements on 200mm and 300mm semiconductor wafers. To this base capability, the Z3D 7200™ adds high-precision film thickness and stress measurement, as well as edge bevel inspection. The design, which uses a single multifunctional measurement head, emphasizes compact form factor, high throughput, low cost of ownership, and high reliability. It is equipped with SEMI(R) compliant automation, ISO Class 2 certified clean hardware, and meets all ergonomic and safety certifications needed for high-volume manufacturing.

Robert Stoner, ZYGO's Vice President, Metrology, made the following comment, "The Z3D 7200™ signals ZYGO's entry into an increasingly important segment of the semiconductor market -- bare wafer manufacturing. It also introduces a theme of multifunctional sensor technology, which we will be building on across the front- and back-end segments of the semiconductor market. As the industry matures, we believe capital budgets will come under sustained pressures, leading wafer and chipmakers to look for ways to reduce both the number and cost of the tools they must buy. We believe multifunctionality is an important piece of the puzzle, because it enables us to provide leading edge technology very cost effectively to our customers throughout the semiconductor industry. With our strong technology team and long history of world-class optical design and innovation, ZYGO is ideally positioned to address these emerging market requirements."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on and timing of new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and fluctuations in our stock price. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K, for the fiscal year ended June 30, 2006.

For Further Information Call:
Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice:  860-704-3955
Contact via http://www.marketwire.com/mw/emailprcntct?id=21E5AFBFBB04519F

SOURCE: Zygo Corporation

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