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News Release
April 5, 2012

ZYGO Receives Over $2 Million Order From a Major Semiconductor Manufacturer

MIDDLEFIELD, Conn., April 5, 2012 (GLOBE NEWSWIRE) -- Zygo Corporation (Nasdaq:ZIGO), a worldwide supplier of optical metrology instruments and high precision optical systems, today announced that its Optics business segment was awarded an order of over $2 million in March by a major semiconductor manufacturer to produce Extreme UltraViolet (EUV) optics used in the development of advanced lithography processes. This order is associated with the CSNE/SEMATECH consortium Micro Exposure Tool (MET-5) program that will help researchers achieve line widths of less than 16 nanometers in support of semiconductor roadmaps projected out to the year 2025. ZYGO is one of only a few companies in the world capable of producing sub-nanometer surface quality optics and is pleased to have been selected to continue fabrication activities on this highly sophisticated ground-breaking initiative developed under the auspices of the SEMATECH program. Development and production is expected to take place over a 22-month period and will be carried out by ZYGO's Extreme Precision Optics (EPO) operation in Richmond, California.

"To be entrusted with this follow-on order for some of the finest EUV optics ever made is testimony to 20 years of accomplishment in this field," said Marc Tricard, Executive Director of Business Development at Zygo.

Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services serving customers in the semiconductor capital equipment, bio-medical, scientific and industrial markets.

The Zygo Corporation logo is available at http://www.globenewswire.com/newsroom/prs/?pkgid=10822

Forward-Looking Statements

All statements other than statements of historical fact included in this news release regarding financial performance, condition and operations and the business strategy, plans, anticipated revenues, bookings, market acceptance, growth rates, market opportunities and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plan(s)," "strategy," "project," "should" and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers; fluctuations in revenues to our major customers; manufacturing and supplier risks; risks of booking cancellations, push-outs and de-bookings; dependence on timing and market acceptance of new product development; rapid technological and market change; risks in international operations; risks related to the reorganization of our business; dependence on proprietary technology and key personnel; length of the revenue cycle; environmental regulations; investment portfolio returns; fluctuations in our stock price; the risk that anticipated growth opportunities may be smaller than anticipated or may not be realized; risks related to business acquisitions, including the acquisition of substantially all the assets of ASML US, Inc.'s Richmond, California facility, and integration of the business and employees; the risks related to the Company's recent changes in senior management; and the risks associated with the recovery from the recent earthquake, tsunami and nuclear disaster in Japan and their impact on our customers, suppliers, and operations. Zygo Corporation undertakes no obligation to publicly update or revise forward-looking statements to reflect events or circumstances after the date of this news release except as required by law. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2011, filed with the Securities and Exchange Commission on September 13, 2011.

CONTACT: John P. Jordan
         Vice President, Chief Financial Officer & Treasurer
         Voice:  860-347-8506
         inquire@zygo.com

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