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News Release
May 13, 2015

Release of Zegage™ Plus Optical Profiler Adds More Speed and Precision to Zegage Product Line

Middlefield, CT - Zygo Corporation is pleased to announce the introduction of the ZeGage™ Plus optical profiler, a full-featured instrument for the 3D measurement of surface topography and roughness. The system provides the same ease of use, vibration robustness and small footprint as the ZeGage profiler but with a higher level of precision, faster measurement speed, and an increased range of measurable surfaces and features.

"The ZeGage Plus is the ideal instrument not only for precision machining applications but also for optical surfaces and precision microstructures that require sub-nanometer vertical precision," notes Eric Felkel, Optical Profiler Product Manager for Zygo."ZYGO precision machining customers, who may have relied previously on stylus profiling, can now gain the benefits of fast, highly repeatable, non-contact area measurement by adopting the ZeGage profiler. Users of the ZeGage Plus model maintain that ability but with higher precision and a high-speed measurement mode for faster throughput."

A High-Performance, Cost-Effective Production Profiler
Manufacturers, who use the high-performance version of ZYGO's entry-level profiler, will now appreciate the faster top measurement speed – which increases throughput – as well as the low cost of ownership. ZYGO's proprietary SureScan™ technology eliminates the need for a vibration isolation system, keeping down the total cost of operation as well the laboratory footprint.

Operators also will be drawn to the system's ability to measure and analyze virtually any surface – rough or specular, transparent or opaque, high or low reflectivity. Competitively, the ZeGage Plus is a more tightly integrated system that is better suited for production applications than other non-contact profilers at its price point.

The ZeGage Plus utilizes ZYGO's proprietary Mx™ software, for enhanced data visualization and quantification of step heights, texture, and volumetric applications. This highly-optimized metrology software for data acquisition and analysis provides added capabilities for regions analysis and advanced patterns. ZeGage Plus profilers, with optional automated X/Y sample stages, have the added ability to combine overlapping measurements for the characterization of larger areas.

Magnification Objectives and Accessories Offered for Wide Range of Applications
ZYGO's wide range of highly optimized objectives provides the user with the ability to select the desired magnification and field of view without affecting height precision. Many of ZYGO's extensive list of parfocal objectives can be used with ZeGage Plus profilers, from 1.4x to 50x, as well as 1x to 10x long working distance, and a 5x super-long working distance lens.

Zygo Corporation, a unit of AMETEK Ultra Precision Technologies Division, is a leading provider of optical metrology solutions, high-precision optics, and optical assemblies used in a wide range of scientific, industrial, and medical applications.

AMETEK, Inc. is a leading global manufacturer of electronic instruments and electromechanical devices with 2014 annual sales of $4.0 billion. For more information, contact ZYGO, 21 Laurel Brook Rd., Middlefield, CT 06455-1291 USA. Telephone: +1-860-347-8506. E-mail:


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