The Audit Committee assists the Board by overseeing and reviewing the work of the Company's independent auditor, monitoring the integrity and effectiveness of the Company's internal accounting controls and financial reporting processes, and ensuring effective communication between the Board, management, and the auditor.

The Compensation Committee assists the Board by determining the most effective total executive compensation strategy based on ZYGO's business goals and consistent with stockholders' interests.

The Corporate Governance & Nominating Committee assists the Board by developing and recommending corporate governance principles and guidelines, nominating individuals for Board and committee membership, identifying the need for additional Board committees, and monitoring the Company's programs for compliance with their Code of Business Conduct & Ethics.