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Dynamic Metrology Surface Profiling Applications

Key Features:
• Fast, non-contact surface topography
  measurement
• Full 3D static and dynamic metrology
  capabilities
• Sub-nanometer Z-resolution
• Variable field-of-view and magnification
• Large vertical scan range
• Comprehensive data segmentation and
  analyses
• Compatible with diffuse or specular
  surfaces
Precise, Non-contact Surface Metrology for MEMS

To meet the challenges and varying needs of MEMS research and production, Zygo Corporation has developed the NewView™ series of 3D optical profilers for precise surface measurement and characterization of micro-devices. Employing leading-edge and patented scanning technology, the NewView™ enables non-contact surface profiling of smooth and rough surfaces, large steps, and thick films, for flexible and complete MEMS metrology on a single platform - with sub-nanometer resolution.

Click here to learn about ZYGO's NewView™ surface profilers.

Inquiry Form
Please use the form below to contact us with any questions you have regarding Dynamic Metrology, or any other ZYGO metrology applications.

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Contact ZYGO today to learn more about MEMS metrology!