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Film Thickness Surface Profiling Applications

Our "TopSlice" and "FilmSlice" data analysis capabilities enable precise measurement of the top surface topography of multilayer processes.

"TopSlice" analysis singles out the film's top surface for topography measurement, while "FilmSlice" identifies the top surface and substrate surface to allow calculation of a film thickness map. "FilmSlice" also permits topography measurement of the substrate surface.

Regardless of the application, ZYGO has a NewView™ optical profiler to fill the need.

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Please use the form below to contact us with any questions you have regarding Film Thickness metrology, or any other ZYGO metrology applications.

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Contact ZYGO today to learn more about film thickness metrology!