GPI™ Series of Interferometers

Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Flat Panel Metrology Stage Position Metrology Photovoltaic Panel Solutions Testing & Certification Services

Laser Interferometers VeriFire™ Series Large Aperture Systems GPI™ Series PTI™ 250 Series DVD400™ Series Expanded Wavelength Capabilities Accessories Upgrades Typical Interferometer Setups

GPI™ Series GPI™ LC GPI™ ST GPI™ FlashPhase™

GPI™ Series

Over their > 15 year existence, the GPI™ series of interferometers have earned the confidence of thousands of users worldwide to provide reliable, accurate, metrology. Recent advances in ZYGO's Interferometric capabilities has resulted in an upgrade of the former GPI™ phase measuring products to the new VeriFire™ Series of interferometer systems. The GPI™ Series of interferometers are now offered with either visual or carrier fringe measurement methods. (All ZYGO phase measuring interferometers are now part of the VeriFire™ Series of products.)

GPI™ LC - The GPI™ LC is the foundation of the GPI™ series. It provides visual fringe analysis for use in the metrology of flat surfaces.

GPI™ ST - The GPI™ ST provides motorized zoom and focus with visual fringe viewing.

GPI™ FlashPhase™ - The GPI™ FlashPhase™ has very low sensitivity to vibration. The system utilizes carrier fringe phase-acquisition technology by acquiring surface information from a single frame of data.

Model:	LC	ST	FlashPhase™
Core Technology:	Visual Fringe		Carrier Fringe
Source:	Point Source
Zoom:	N/A	Motorized 1-6X
Focus:	N/A	Motorized
Camera Resolution:	512 x 492 pixels	768 x 494 pixels	640 x 480 pixels