VeriFire™ Series

Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Flat Panel Metrology Stage Position Metrology Photovoltaic Panel Solutions Testing & Certification Services

Laser Interferometers VeriFire™ Series Large Aperture Systems GPI™ Series PTI™ 250 Series DVD400™ Series Expanded Wavelength Capabilities Accessories Upgrades Typical Interferometer Setups

VeriFire™ Series VeriFire™ XP/D VeriFire™ PE VeriFire™ AT+ VeriFire™ MST VeriFire™ Asphere

Tailored Solutions

If you don't see a standard ZYGO product that fits your need exactly, look into our Tailored Solutions service.

VeriFire™ Series

ZYGO's VeriFire™ Series further exceeds the performance of our industry-standard GPI™ products with capabilities and features that include mechanical phase acquisition, superior optics quality, high-resolution CCD cameras, vibration correction software, aspheric surface metrology and patented artifact suppression technology. While all VeriFire™ models can perform standard interferometric metrology, each model offers a unique capabilities that set it apart in the industry.


Model:	XP/D	PE	AT+	MST	Asphere
Core Technology:	Phase-Shifting Interferometry (PSI)			Fourier Transform Phase Shifting Interferometry	PSI with proprietary asphere algorithms
Source:	Point Source		Point source and Ring of Fire (artifact suppression)
Zoom:	Motorized 1-6X		Encoded 1-5X
Focus:	Motorized		Encoded (stepper focus)
Camera Resolution:	640 x 480 pixels		1000 x 1000 pixels
Camera Frame Rate:	75 Hz	210 Hz	43 Hz

Key Features:

• High performance interferometers for production, quality control and research and development applications.

• Wide range of metrology capabilities from flats to spheres to conics and aspheres.

• New hardware and software features provide unmatched value.

• Increase production throughput by minimizing operator variability.

• Proprietary artifact suppression capability.

VeriFire™ XP/D - The VeriFire™ XP/D achieves excellent accuracy and repeatability using phase modulation, a 640 x 480 pixel digital camera, and ZYGO's powerful MetroPro® data acquisition and analysis software.

VeriFire™ PE - The VeriFire™ PE is configured for accurate metrology in production environments. The PE systems includes a high speed digital camera which provides rapid data acquisition enabling accurate phase acquisition in the presence of nominal production vibrations. When extreme vibrations are present the PE can be operated with FlashPhase™ software which requires only a single frame of data to provide surface form metrology results.

VeriFire™ AT+ - The VeriFire™ AT+ represents ZYGO's highest performance interferometer with mechanical phase acquisition. The AT+ comes standard with a 1000 x 1000 pixel CCD camera for high resolution metrology, ZYGO's proprietary Ring of Fire™ illumination system for artifact suppression and encoded zoom and focus capabilities which minimize variability among operators.

VeriFire™ MST - The VeriFire™ MST utilizes a wavelength shifting laser and patented data acquisition methods to enable simultaneous measurement of the front and back surface of transparent optics, thickness variation (including wedge) and simple 2-step homogeneity metrology without difficult part preparation or messy coatings.

VeriFire™ Asphere - The first metrology tool for fast, noncontact, high-accuracy 3D metrology of aspheric surfaces. Production-friendly features include automated alignment, acquisition, and analysis.

Capability-Expanding Products

Accessories - ZYGO offers a wide variety of accessories to expand or enhance the capabilities of your interferometer system.

Large Aperture Systems - ZYGO offers Large Aperture Systems in 12", 18" 24" and 32" apertures, which can be used to measure both surface form and transmitted wavefront quality.

Expanded Wavelength Capabilities - ZYGO's precise phase-shifting interferometer solutions are available in several additional wavelengths ranging from 248 nm to 10.6 µm.

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