Asphere Metrology

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Verifire™ Asphere Interferometer System for Fast, Non-contact,
High-Accuracy 3D Metrology of Aspheric Surfaces

Verifire Asphere Interferometer System
The Verifire Asphere provides high resolution surface metrology for quantitative three-dimensional measurements of aspheric shaped surfaces using patented non-contact interferometric techniques for production and process control.

Based on two of ZYGO's core competencies, the patented multi-zoned metrology method provides a high resolution aspheric surface measurement. With multiple axes of motorized stages, the Verifire Asphere offers automated alignment, acquisition and analysis of aspheres. The result is a fast, high resolution quantitative aspheric surface measurement.

Key Features:

• Fast and flexible aspheric metrology

• Non-contact measurement maintains surface integrity

• Easy set-up and alignment results in excellent production throughput

• High resolution 3D result ensures measurement of localized surface features

Aspheric Metrology - 3D Plot
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