VeriFire™ Asphere
Fast, Noncontact, High-Accuracy 3D Metrology of Aspheric Surfaces
The VeriFire™ Asphere provides high resolution surface metrology for quantitative three-dimensional measurements of aspheric shaped surfaces using patented noncontact interferometric techniques for production and process control.
Based on two of ZYGO's core competencies, the patented multi-zoned metrology method provides a high resolution measurement of an aspheric surface. With multiple axes of motorized stages, the VeriFire™ Asphere offers automated alignment, acquisition and analysis. The result is a fast, high resolution quantitative aspheric surface measurement.
Key Features:
Fast and flexible aspheric metrology
Noncontact measurement maintains surface integrity
Easy set-up and alignment results in excellent production throughput
High resolution 3D result ensures measurement of localized surface features
|