VeriFire™ MST

Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Flat Panel Metrology Stage Position Metrology Photovoltaic Panel Solutions Testing & Certification Services

Laser Interferometers VeriFire™ Series Large Aperture Systems GPI™ Series PTI™ 250 Series DVD400™ Series Expanded Wavelength Capabilities Accessories Upgrades Typical Interferometer Setups

VeriFire™ Series VeriFire™ XP/D VeriFire™ PE VeriFire™ AT+ VeriFire™ MST VeriFire™ Asphere

VeriFire™ MST

The VeriFire™ MST provides results and measurement capabilities never before available. The VeriFire™ MST starts with the classical interferometer applications. These applications all measure the wavefront variations between two surfaces, a two-surface cavity. However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that only confuse standard Phase Shift Interferometry algorithms.

ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI). The VeriFire™ MST can measure two-surface, three- and even four-surface cavities. Show all of the surfaces, or only the surfaces of interest, all within MetroPro® software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.

Key Features:

• Simultaneously measures two-surface, three- and even four-surface cavities.

• Greatly simplifies homogeneity metrology.

• Measures front surface map, optical thickness variation, and the back surface approximation.