Large Aperture Interferometer

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Verifire™ XL Large-Aperture Downward-Looking
Interferometer Workstation

Verifire XL Interferometer System Animated comparison of a PSI measurement with fringe print-through due to vibration, and the same surface measured with QPSI™ technology – free of noisy print-through.
Animated comparison of a PSI measurement with fringe print-through due to vibration, and the same surface measured with QPSI™ technology – free of noisy print-through.
Integrated transmission element, and lightweighted optic on measurement stage
Integrated transmission element.
The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space.

Vibration Robust

The Verifire XL system includes ZYGO's patented QPSI™ acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.

Accurate Metrology

The high-performance transmission flat in the Verifire XL system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.

Mx™ Software

ZYGO's proprietary Mx™ measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Mx software now includes SmartAveraging™ technology that helps to obtain the best possible measurement in the shortest amount of time, and the built-in SPC provides powerful capability for production situations.

Key Features:

• 12" (300 mm) aperture

• Compact footprint, self-contained system

• Easy part loading and alignment

• Simple setup and streamlined operation

• Built-in pre-aligned transmission flat

• Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments

Inquiry Form
Please use the form below to contact us with any questions you have regarding ZYGO's Verifire XL interferometer system, or interferometry in general.

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Contact ZYGO today to learn more about the Verifire XL!