Flat Panel Metrology

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Flat Panel Metrology Advanced Process Metrology for Flat Panel Display Manufacturing

As of October 2009, the Flat Panel Metrology products are being manufactured and sold by Toho Technology Corporation of Nagoya, Japan. Please read the news release for additional information.

Key Features:

• Increase Yields and Lower Operating Costs

• Boost Productivity and Efficiency

• Improve Time-to-Market

• Optimize Process Knowledge

• Shorten Cycle Times and Ramp-Up

• Reduce Scrap, Re-work, and Down Time

Flat Panel Metrology (FPM) Systems maximize your process so you can produce more panels with higher yields - in less time at a lower cost. Important photo-spacer (PS) and Multi-domain Vertical Alignment (MVA) features can be easily characterized for immediate visualization and quantitative analysis for rapid process feedback.

The unique OneShot™ measurement software permits simultaneous inspection of:

• Photo Spacers: height, top Dx/Dy, top area, bottom Dx/Dy, bottom area

• MVA: height, bottom width

• Overlay: on-chip PS to RGB and MVA to RGB

• RGB Color Filter: height difference, top surface topography, thickness map, bottom surface topography

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