Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Stage Position Metrology Testing & Certification Services

Semiconductor Systems CSP-3000™ ZVS-200P™ ZVS-200S™ HZ6000™ Nano-3™ CP7300™


Semiconductor Systems

Nano-3 for Bump Metrology Singulated Part, Strip, Panel and Wafers ZYGO's semiconductor metrology systems enable manufacturers to improve the quality and yield of their processes, while lowering metrology costs.

Metrology, Process Control and
Manufacturing Inspection Equipment

CSP-3000™ – 100% inspection of flip-chip CSP (FC-CSP) strips. Inspects a mixture of round and flat bumps in a single measurement – the only inspection tool capable of measuring both.

ZVS-200P™ – In-tray inspection of 3D/2D/marking/Package Visual Inspections (PVI), with the highest throughput in the industry – up to 120,000 units per hour.

ZVS-200S™ – Fully automatic, in-tray inspection of flip-chip substrates. Dedicated to C4 round and flat bumps inspection, ZVS-200S features high accuracy, and throughput that leads the industry.

HZ6000™ – Third-generation 3D vision system, designed for 100% inspection of singulated flip-chip substrates in high-volume production. Inspects C4 round and flattened bumps, measuring volume, height, diameter, coplanarity and warpage.

Nano-3™ – Powered by Zygo's patented FMI-3™ technology, Nano-3 provides the highest precision 3D/2D Semiconductor Package Inspection System for C4, BGA, LGA and All Bumps and Pads.

CP7300™ – Measures 3D surface height, roughness, and local area planarity and uniformity measurements on wafers for rapid, quantitative characterization of photo-lithographic, etch, and polishing process effects. Fast, non-contact, and automated.

Inquiry Form
Please use the form below to contact us with any questions you have regarding the Zygo's Semiconductor Systems products.

First Name * Last Name *
Phone Number * E-mail Address *
Company or Organization * Job Title*
Street Address * City *
State/Province* Zip/Postal Code *
Country *

Please type your inquiry below:
* Required entries    

AMETEK, Inc. Logo
Contact ZYGO today to learn more about ZYGO's metrology solutions for Semiconductor package manufacturing!
Follow ZYGO on Twitter!