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Stage Position Metrology ZMI™ Series Displacement Measuring Interferometers
Heterodyne displacement interferometry.
Highly stable, easy to align, and insensitive to signal amplitude changes.
Extremely robust for OEM applications.
A single laser source can support multiple axes.
High signal to noise phase measurements enable high precision and eliminate false counts, even at zero slew rates.
Lithography tools: optical steppers and scanners, e-beam & laser mask writers
Metrology tools: Mask, wafer and LCD inspection and measurement tools, CD-SEMs
Process equipment: memory repair tools, probers, die bonders, drilling tools
Calibration: Measurement and calibration of high resolution or high frequency mechanical motions
Configure the System that's Exacty Right for YouZYGO offers a variety of...
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Zygo® measures surfaces of microbial biofilms, PTFE nanocomposite films & silver tantalate coatings, with high precision #STLE2013 Booth 221
Zygo® 3D optical surface profilers measures microsurface features with nanometer-scale precision. #STLE2013 Booth 221
#STLE2013 Zygo Booth 221 for high-precision quantitative 3D measurements of surfaces and microstructural properties.