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Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems

Example Systems 2-Axis System 2-Axis System (Vacuum) 3-Axis System Flat Panel Application

Flat Panel Application DMI System Example Systems - ZMI™ Series

Applications for processing LCD substrates can involve large beam paths and stage tilt, introducing large beam shear. A combination of the ZMI™ 7714 laser with an 8 mm beam diameter and ZMI™ 4004 measurement boards provides a robust solution for large beam shear applications.

ZMI™ 4000 series measurement boards require a VME64x chassis, which ZYGO does not supply.

Click to see Bill of Materials

Key ZMI™ Components

Item Qty Description Part #
1 1 ZMI™ 7714 Laser, 8mm Beam, Class IIIa, 1250µW 8070-0279-01
2 1 Compact laser head cradle 8070-0154-01
3 3 ZMI™ 4004 Measurement Board (4-axis) 8020-0102-09
4 2 Electrical reference jumper cable 1115-800-279
5 1 10% beam splitter 6191-0138-09
6 2 33% beam splitter 6191-0138-01
7 8 50% beam splitter 6191-0138-02
8 6 Fold Mirror 6191-0138-03
9 12 High Performance HSPMI Straight beam, FOP right, horizontal mount 8080-0342-72
10 12 Fiber optic cable assembly, 30 m 8020-0410-10
11 1 Fiber optic cable assembly, 10 m 8020-0410-04

Optional ZMI™ Components

Item Qty Description Part #
1 1 ZMI™ laser Head Power Supply 8010-0105-01
2 1 Laser head cable, power and RS-232, 4 m 1115-801-346
3 17 Beam splitter / Fold Mirror Mount 6191-0445-01

Other Optional Items

Item Description Suggested Suppliers
1 Recirculating chiller for ZMI™ 7714 & 7722 Lasers Thermo Scientific (e.g. NESLAB RTE-7), Lytron
2 Power supply for ZMI™ Laser (\xB1 15 VDC) ZYGO (8010-0105-0X), Digikey Corp., Agilent
3 VME64x Chassis for ZMI™ 4000 Measurement Boards Schroff (Pentair), Carlo Gavazzi
4 Interface between PC and VME bus (PCI/VME, USB/VME, etc.) National Instruments, Phoenix Mecano (Wiener Group)
5 Neutral Density (ND) filters, alignment mirrors, etc. Edmund Optics, Thorlabs, CVI/Melles Griot
6 Digital I/O for ZMI™ P2 bus National Instruments, Measurement Computing
7 Motion Control Electronics Delta Tau, ACS, Aerotech, Copley Controls, Galil
8 Custom cables and cable components Digikey Corp.

AMETEK, Inc. Logo Manuals Technical Papers

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Contact ZYGO today to learn more about ZMI™ Series Systems!