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Compact Series Interferometers ZMI™ Series - Displacement Measuring Interferometers

LC 2-axis HSPMI
The Compact Series interferometers have a low profile and use small 3-mm beams to accommodate small target mirrors. One, two, and three-axis versions are available.
Description: Compact 1-Axis HSPMI Compact 2-Axis HSPMI Compact 3-Axis HSPMI
Part Number: 6191-0541-0X 6191-0542-0X 6191-0624-0X
Measurement: Displacement Displacement, yaw Pitch, yaw, displacement
Number of axes: 1 2 3
Target: Plane mirror
Optical Resolution: λ/4
Maximum Input Beam Size: 3 mm
Vacuum Compatible Version Available: Yes Yes No
Fiber Optic Pickup Mounting Method: Mounted separately Integrated
Interferometer Mount: 8050-0109-01 8050-0110-01 6191-0446-01
Precision Adjustable Mount: 6191-0310-03 6191-0310-04 6191-0310-01

ZYGO's Beam Reducing Telescope, P/N 6191-0372-01, can be used to reduce 6 mm beams to 3 mm beams suitable for the Compact Series interferometers. The Beam Reducing Telescope can be mounted on ZYGO's standard Interferometer Mount, P/N 6191-0446-01.

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