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Products
Optical Surface Profilers
Laser Interferometers
Semiconductor Systems
Stage Position Metrology
Testing & Certification Services
Stage Position Metrology Laser Heads Interferometers & Optics Measurement Electronics Cables & Feedthroughs Example Systems |
Laser Heads ZMI™ Series - Displacement Measuring InterferometersZMI™ lasers provide frequency stabilized, two-frequency output to drive multiple measurement axes. The small ZMI™ 7705 is used with the ZMI™ 501A measurement enclosure to provide two axes of measurement. The larger lasers include features such as more power (7702), water cooling (7714), and separate laser source and delivery modules (7722/7724). These lasers can typically provide enough light to support tens of measurement axes.
Inquiry Form
Please use the form below to contact us with any questions you have regarding Zygo's Stage Position Metrology systems.
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Spec Sheets
Manuals
Technical Papers
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Contact ZYGO today to learn more about ZMI™ Series Laser Heads!
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