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Measurement Electronics ZMI™ Series - Displacement Measuring Interferometers

ZMI™ measurement electronics calculate displacement using optical signals from the interferometers and an optical reference signal from the laser. The ZMI™ 501A provides two axes of measurement in a stand-alone enclosure. All other ZMI™ measurement boards are used in a VME chassis. Multiple boards may be used together in the same chassis for applications requiring up to 64 axes of measurement.

Model: 501A 2400 4004 4104(C)
Part Number: 8020-0237-01 8020-0104-0X 8020-0102-09 8020-0103-0X
Number of Axes/Board: 2 1 or 2 4
Board Type: Enclosure 6U VME 6U VME64x
Minimum Optical Power: 8.0 µW 1.9 µW 1.0 µW 0.07 µW
Cyclic Error Compensation: No Yes
Position Resolution: 1.24 nm 0.31 nm 0.15 nm
Velocity Range at
Full Resolution:
±0.475 m/s ±2.1 m/s ±2.55 m/s
Max Acceleration: 10 g 100 g
Data Age Uncertainty: NA ±1.2 ns ±0.2 ns (one board)
±1.0 ns (multiple boards)
Accuracy at Max Velocity (σ): 1.6 nm 0.5 nm 0.2 nm
Compatible Laser(s): 7705 7702, 7714, and 7724

Note: Specifications are for double-pass interferometers.
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