Optical Surface Profilers

Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Stage Position Metrology Testing & Certification Services

Optical Surface Profilers ZeGage™ ZeGage™ Plus NewView™ 8000 Nexview™ Nomad™  New! NewView™ 7300 NewView™ 7100 APM650™  New! NewView™ MPT Mx™ Software Profiler Objectives

3D Optical Surface Profilers Choose the right Optical Profiler system for your application

Optical profilers from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical profilers include proprietary data analysis and system control software. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.

ZeGage Optical Surface Profiler ZeGage Plus Optical Surface Profiler NewView 8000 Optical Surface Profiler Nexview Optical Surface Profiler Nomad Portable Optical Surface Profiler
Model: ZeGage
Surface Profiler
ZeGage Plus
Optical Surface Profiler
NewView 8000
Surface Profiler
Surface Profiler
New! Portable
Surface Profiler
Core Technology: CSI* CSI & PSI* CSI*
STR: 3.5 nm 0.15 nm 0.12 nm 0.08 nm 0.12 nm
Vert. Scan Speed: ≤ 35 μm/s ≤ 73 μm/s ≤ 96 μm/s ≤ 15 μm/s
Max. Step Height: ≤ 20 mm ≤ 95 µm
System Zoom: Fixed Automated Fixed
Z Stage: Automated Motorized
X/Y Stage: Manual or Automated (optional) Automated N/A
Field of View: ≤ 9 mm ≤ 16 mm ≤ 12 mm
Software: Mx
Notes:  STR (Surface Topography Repeatability) is a quantification of instrument capability, per ISO 25178-604.  STR can be improved by filtering and/or measurement averaging.
* CSI = Coherence Scanning Interferometry
   PSI = Phase Shifting Interferometry

Profiler Objectives

Objectives for Zygo Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives Zygo offers for its optical profilers is unmatched in the industry, and is continually growing. All Zygo objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to Zygo.

Zygo also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

Specialty Models

APM650™ - The APM650™ packaging metrology system provides automated measurement of panel-based PCBs and other advanced packaging applications. It provides both 2D & 3D measurements with sub-nanometer vertical precision and sub-micron lateral precision. The APM650 system features a large X/Y stage which accommodates panels up to 650 x 650 mm.

NewView™ MPT™ - ZYGO's NewView™ MPT makes it easy to measure precision parts right on the factory floor with a rugged enclosure that provides a secure, yet service-accessible, housing for the NewView™ 7000 Series surface profiling system.

Inquiry Form
Please use the form below to contact us with any questions you have regarding Zygo's Optical Profiler systems, or surface profiling in general.

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Contact ZYGO today to learn more about Optical Surface Profilers!