Optical Surface Profilers

Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Stage Position Metrology Testing & Certification Services

Optical Surface Profilers Nexview™ ZeGage™ ZeGage™ Plus  New! NewView™ 7100 NewView™ 7300 NewView™ 8000 NewView™ MPT Mx™ Software Profiler Objectives


3D Optical Surface Profilers Choose the right Optical Profiler system for your application

Optical profilers from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. All of our optical profilers include proprietary data analysis and system control software. Choosing the right surface measurement system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.


ZeGage Optical Surface Profiler ZeGage Plus Optical Surface Profiler NewView 7100 Optical Surface Profiler NewView 7300 Optical Surface Profiler NewView 8000 Optical Surface Profiler Nexview Optical Surface Profiler
Model: ZeGage
Optical
Surface
Profiler

ZeGage Plus
Optical
Surface
Profiler
New!
NewView
7100

Optical
Surface
Profiler
NewView
7300

Optical
Surface
Profiler
NewView
8000

Optical
Surface
Profiler
Nexview
Optical
Surface
Profiler
 
Core Technology: CSI** CSI & PSI**
Vert. Scan Speed: ≤ 35 μm/s ≤ 73 μm/s ≤ 26 μm/s ≤ 135 μm/s ≤ 96 μm/s
Max. Step Height: ≤ 20 mm
System Zoom: Fixed Automated
Z Stage: Automated
X/Y Stage: Manual or Automated (optional) Automated
Field of View: ≤ 9 mm ≤ 14 mm* ≤ 16 mm
Software: Mx MetroPro Mx
* A larger field of view is possible with the megapixel camera and/or stitching option.
** CSI = Coherence Scanning Interferometry
    PSI = Phase Shifting Interferometry

Profiler Objectives

Objectives for Zygo Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives Zygo offers for its optical profilers is unmatched in the industry, and is continually growing. All Zygo objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to Zygo.

Zygo also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

Specialty Model

NewView™ MPT™ - ZYGO's NewView™ MPT makes it easy to measure precision parts right on the factory floor with a rugged enclosure that provides a secure, yet service-accessible, housing for the NewView™ 7000 Series surface profiling system.
Inquiry Form
Please use the form below to contact us with any questions you have regarding Zygo's Optical Profiler systems, or surface profiling in general.

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Contact ZYGO today to learn more about Optical Surface Profilers!