Profilometers, Optical Profilometer

Products Optical Surface Profilers Laser Interferometers Semiconductor Systems Stage Position Metrology Testing & Certification Services

Optical Surface Profilers ZeGage™ ZeGage™ Plus NewView™ 8000 Nexview™ Nomad™  New! APM650™  New! NewView™ MPT Mx™ Software Profiler Objectives Profilometers

Profilometers Choose the right Profilometer for your surface profiling application

Profilometer Measurement of Machining Marks
Profilometer Measurement of Machining Marks

Profilometers (optical profilers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D profilometry of surface features. ZYGO profilometers include proprietary data analysis and control software. Choosing the right profilometer system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.

ZeGage Profilometer NewView 7100 Profilometer NewView 7300 Profilometer NewView 8000 Profilometer Nexview Profilometer
Model: ZeGage


Core Technology: CSI** CSI & PSI**
Vertical Scan Speed: ≤ 21 μm/s ≤ 26 μm/s ≤ 135 μm/s ≤ 96 μm/s
Max. Step Height: ≤ 20 mm ≤ 20 mm
System Zoom: Fixed Fixed Automated
Z Stage: Automated
X/Y Stage: Manual or Automated (optional) Automated
Field of View: ≤ 9 mm ≤ 14 mm* ≤ 16 mm
Software: Mx MetroPro Mx
* A larger field of view is possible with the megapixel camera and/or stitching option.
** CSI = Coherence Scanning Interferometry
    PSI = Phase Shifting Interferometry

Profiler Objectives

Objectives for ZYGO Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.

ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

Factory Floor Profilometry

NewView™ MPT™ - ZYGO's NewView™ MPT shop-floor profilometer system makes it easy to perform surface profiling of precision parts in a production environment with a rugged enclosure that provides a secure, yet service-accessible, housing for the NewView™ 7000 Series profilometer.
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Contact ZYGO today to learn more about 3D Profilometers!