Profilometers, Optical Profilometer

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Optical Surface Profilers ZeGage™ ZeGage™ Plus NewView™ 8000 Nexview™ Nomad™  New! APM650™  New! NewView™ MPT Mx™ Software Profiler Objectives Profilometers


Profilometers Choose the right Profilometer for your surface profiling application

Profilometer Measurement of Machining Marks
Profilometer Measurement of Machining Marks

Profilometers (optical profilers) from ZYGO are white light interferometer systems, offering fast, non-contact, high-precision 3D profilometry of surface features. ZYGO profilometers include proprietary data analysis and control software. Choosing the right profilometer system depends on your application's requirements, including precision, speed, automation, configuration flexibility, and vertical range.


ZeGage Profilometer ZeGage Plus Profilometer NewView 8000 Profilometer Nexview Profilometer Nomad Portable Profilometer
Model: ZeGage
Profilometer
 
ZeGage Plus
Profilometer
 
NewView 8000
Profilometer
 
Nexview
Profilometer
 
Nomad
Portable
Profilometer
Configuration: Benchtop Workstation Portable
Core Technology: CSI* CSI & PSI* CSI*
STR: 3.5 nm 0.15 nm 0.12 nm 0.08 nm 0.12 nm
Vert. Scan Speed: ≤ 35 μm/s ≤ 73 μm/s ≤ 96 μm/s ≤ 15 μm/s
Max. Step Height: ≤ 20 mm ≤ 95 µm
System Zoom: Fixed Automated Fixed
Z Stage: Automated Motorized
X/Y Stage: Manual or Automated (optional) Automated N/A
Field of View: ≤ 9 mm ≤ 16 mm ≤ 12 mm
Software: Mx
Notes:  STR (Surface Topography Repeatability) is a quantification of instrument capability, per ISO 25178-604.  STR can be improved by filtering and/or measurement averaging.
* CSI = Coherence Scanning Interferometry
   PSI = Phase Shifting Interferometry

Profiler Objectives

Objectives for ZYGO Optical Profilers
Optical profiler objectives, mounted on a turret
The performance and capability of any optical profiler is largely dependent on the lens objectives it uses. Objectives determine the magnification, working distance, slope capability, and field of view of the profiler, so choosing the right objective(s) is very important to achieving your metrology goals. The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing. All ZYGO objectives are designed and manufactured in-house, ensuring top-quality objectives that are ideally suited for use in our profilers. This capability is unique to ZYGO.

ZYGO also offers specialty objectives for long working distances, wide field of view, and the ability to measure thin films and surfaces that are under a transparent surface. Download the objectives selection chart (PDF) to see our full lineup of objectives.

Factory Floor Profilometry

NewView™ MPT™ - ZYGO's NewView™ MPT shop-floor profilometer system makes it easy to perform surface profiling of precision parts in a production environment with a rugged enclosure that provides a secure, yet service-accessible, housing for the NewView™ 7000 Series profilometer.
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Contact ZYGO today to learn more about 3D Profilometers!