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Technical Papers

This page provides a list of all available Technical Papers and articles written by ZYGO scientists and engineers, grouped by type of product. All Technical Papers are provided as PDF documents. Articles are generally provided as links to the article on the publisher's web site.

Many papers and/or articles are relevant to more than one type of product, and therefore may appear in more than one of the categories listed below.

Recently Added

Applications of model-based transparent surface films analysis using coherence scanning interferometry Interference microscope objectives for wide-field areal surface topography measurements

Surface Profiling

Applications of model-based transparent surface films analysis using coherence scanning interferometry Interference microscope objectives for wide-field areal surface topography measurements The meaning and measure of vertical resolution in surface metrology Interference Microscopy for Surface Structure Analysis (book chapter) A new class of wide-field objectives for 3D interference microscopy Show All 49 Items

Laser Interferometry

Axial alignment for high-precision interferometric measurements of steeply-curved spheres Interferometry, Measuring with Light Model-based phase shifting interferometry Correlated errors in phase-shifting laser Fizeau interferometry Achieving Precision Radius Metrology for Large Optics Show All 38 Items

Optics

Selecting A Sapphire Window Manufacturer For High-Reliability ISR Applications: 6 Important Criteria 4 Big Mistakes in Developing Photonics-Enabled Medical Devices Projection Optics for Extreme Ultraviolet Lithography (EUVL) Micro-field Exposure Tools (METs) with a Numerical Aperture of 0.5 Recent advances in high-performance window fabrication PVr - a robust amplitude parameter for optical surface specification Show All 12 Items

Semiconductor Wafer Metrology

Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures Transparent film profiling and analysis by interference microscopy Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Show All 7 Items

Flat Panel Display Metrology

Transparent film profiling and analysis by interference microscopy Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry Generating fringe-free images from phase-shifted interferometry data Signal modeling for low-coherence height-scanning interference microscopy Show All 14 Items

Stage Position Metrology

Interferometry, Measuring with Light Revelations in the art of fringe counting: The state of the art in distance measuring interferometry Displacement Measuring Interferometry (book chapter) The Expanding Role of Optical Metrology in Precision Engineering Displacement Measuring Interferometry Measurement Uncertainty Show All 10 Items

Aspheric Form Metrology

Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Munich 2009) Interferometric Measurement of Rotationally Symmetric Aspheric Surfaces (Rochester 2007) Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces Asphere interferometry powers precision lens manufacturing

Miscellaneous

4 Big Mistakes in Developing Photonics-Enabled Medical Devices Application of precision diamond machining to the manufacture of microphotonics components Interferometer design for writing Bragg gratings in optical fibers Long-term performance of the DUV optical metrology tool for the 90-nm node DUV optical metrology for the 90-nm node, CD linearity, contacts, and corner rounding Show All 12 Items

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