Optical Mirrors

Optics Business Segment Optical Components Group Electro-Optics Group Markets & Applications Optical Materials Case Studies Contact

Optical Components Group Aspheres Extreme Precision Optics Super Finishing Optical Windows High Fluence Products Transmission Spheres & Flats Precision Reference Surfaces Optical Mirrors Corner Cube Retroreflectors High Precision Prisms Spherical Optics Thin Plate Optics Glass & Ceramic Machining Semiconductor Stage Components Coatings


Optical Mirrors

Precision Optical Mirrors for Lithographic Steppers
Key Features

• Geometry (flats, spheres, aspheres) to better than λ/50 PV.

• Full aperture interferometry up to 32" for flats, and up to 12" for spheres/aspheres (larger with stitching).

• Surface Roughness < 1 nm rms.

ZYGO's Optics business segment manufactures precision optical mirrors to exacting standards.

Applications

ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to:

• EUV mirrors

• Lightweighted mirrors

• Space mirrors

Stage Components for lithographic steppers

• X-ray mirrors

Defense/Aerospace

Medical/Life Sciences

Industrial OEM

• Intelligence, surveillance & reconnaissance
(ISR)

Materials

ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include:

CLEARCERAM® mirrors

Cordierite mirrors

Silicon Carbide mirrors

• Silicon mirrors

ULE® mirrors

• Zerodur® mirrors


Types

ZYGO produces a variety of types high quality custom optical mirrors, including:

• Aspheric mirrors

• EUV Mirrors

Flat mirrors

Light-Weighted Mirrors

• Monolithic Mirrors

Off-axis mirrors

• Parabolic mirrors

• Spherical mirrors


ZYGO has a wide range of other precision optical manufacturing capabilities, such as:

• Multi-axis CNC machining & Single-Point Diamond Turning (SPDT)

• A large installed base of very large full aperture polishing process including many multi-meter class polishers

• Extensive experience in key sub-aperture finishing processes such as Computer Controlled Optical Surfacing (CCOS), Ion Beam Finishing (IBF) and Magneto-Rheological Finishing (MRF), through a variety of commercially available and custom made equipment

• Large coating capabilities and capacity

• Extensive cleaning (included automated) and inspection stations

• A wide range of metrology capabilities to characterize components across their entire Power-Spectral Density, with interferometers as large as 32" in diameter, and a wide range of state-of-the-art custom-made equipment.

Inquiry/Quote Form – Optical Mirrors
Please use the form below to tell us about the optical mirror you need, or ask questions about any of ZYGO's optical products, services, or capabilities. You may send any additional information, including specifications and/or prints, to:

First Name * Last Name *
Job Title or Function * E-mail Address *
Company or Organization * Phone Number *
Street Address * City *
State/Province * Zip/Postal Code *
Country *
If you experience any difficulty submitting this form, please contact:
Wavelength:     
Optic Type:     
Optic Shape:     
Geometry:  
Coating Type:
Quantity:
Additional Info: 
* Required entries  

AMETEK, Inc. Logo

Features
Brochures Spec Sheets Technical Papers

Contact ZYGO's Optics business segment at 800-ZYGO-NOW.