Silicon Carbide Mirrors (SiC)

Optics Business Segment Optical Components Group Electro-Optics Group Markets & Applications Optical Materials Case Studies Contact

Optical Components Group Aspheres Extreme Precision Optics Super Finishing Optical Windows High Fluence Products Transmission Spheres & Flats Precision Reference Surfaces Optical Mirrors Corner Cube Retroreflectors High Precision Prisms Spherical Optics Thin Plate Optics Glass & Ceramic Machining Semiconductor Stage Components Coatings CLEARCERAM® Mirrors Cordierite Mirrors Silicon Carbide Mirrors ULE® Mirrors Reference Mirrors

Silicon Carbide Mirrors

Lightweight Silicon Carbide Mirror, Polished Side
Lightweight Silicon Carbide Mirror, Polished Side

Silicon Carbide Mirror, Lightweighted Side

Silicon Carbide Mirror, Lightweighted Side
ZYGO's Optics business segment custom manufactures silicon carbide mirrors to exacting standards.

Silicon carbide (SiC) has long been recognized as an attractive mirror material due to its superior mechanical and thermal properties when compared to conventional optical materials. However, the material properties of silicon carbide, which make the material attractive from a design standpoint, have often precluded its use when low cost and rapid delivery of an optical mirror were required.

It is normally expensive to produce a lightweighted, super-polished SiC substrate, and the lead-time for obtaining a finished substrate used to be several months. However, working in conjunction a material provider, and using deterministic finishing techniques for the rapid fabrication of lightweight silicon carbide optics, ZYGO can produce high-quality SiC mirrors in a much shorter time as compared to traditional techniques.


In addition to flat mirrors, ZYGO produces a variety of types high quality custom optical mirrors, including:

• Aspheric mirrors

• EUV Mirrors

Light-Weighted Mirrors

• Monolithic Mirrors

Off-axis mirrors

• Parabolic mirrors

• Spherical mirrors


ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include:


Cordierite mirrors

Silicon Carbide mirrors

• Silicon mirrors

ULE® mirrors

• Zerodur® mirrors


ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to:

EUV mirrors

• Lightweighted mirrors

• Space mirrors

Stage Components for lithographic steppers

• X-ray mirrors


Medical/Life Sciences

Industrial OEM

• Intelligence, surveillance & reconnaissance

In addition to plano silicon carbide mirrors, ZYGO has a wide range of optical manufacturing capabilities, such as:

• Multi-axis CNC machining & Single-Point Diamond Turning (SPDT)

• A large installed base of very large full aperture polishing process including many multi-meter class polishers

• Extensive experience in key sub-aperture finishing processes such as Computer Controlled Optical Surfacing (CCOS), Ion Beam Finishing (IBF) and Magneto-Rheological Finishing (MRF), through a variety of commercially available and custom made equipment

• Large coating capabilities and capacity

• Extensive cleaning (included automated) and inspection stations

• A wide range of metrology capabilities to characterize components across their entire Power-Spectral Density, with interferometers as large as 32" in diameter, and a wide range of state-of-the-art custom-made equipment.

Inquiry/Quote Form – Optical Mirrors
Please use the form below to tell us about the silicon carbide mirror you need, or ask questions about any of ZYGO's optical products, services, or capabilities. You may send any additional information, including specifications and/or prints, to:

First Name * Last Name *
Job Title or Function * E-mail Address *
Company or Organization * Phone Number *
Street Address * City *
State/Province * Zip/Postal Code *
Country *
If you experience any difficulty submitting this form, please contact:
Optic Type:     
Optic Shape:     
Coating Type:
Additional Info: 
* Required entries  

AMETEK, Inc. Logo

Brochures Spec Sheets Technical Papers

Contact ZYGO's Optics business segment at 800-ZYGO-NOW.