ULE® Optical Mirrors

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ULE® Mirrors Mirrors made from Corning® ULE® (Ultra Low Expansion) Titania Silicate Glass

Optical Components by ZYGO's Optics business segment
ZYGO's Optics business segment can custom manufacture precision ULE® mirrors to your exact specifications. ULE® mirrors are made from a titania silicate glass which features ultra-low thermal expansion over a wide temperature range. ULE® is well suited for applications where thermal stability is critical.


ZYGO produces a variety of types high quality custom optical mirrors, including:

• Aspheric mirrors

• EUV Mirrors

Flat mirrors

Light-Weighted Mirrors

• Monolithic Mirrors

Off-axis mirrors

• Parabolic mirrors

• Spherical mirrors


ZYGO has the capability to process a wide range of materials for optical mirrors. Our product capabilities include:


Cordierite mirrors

Silicon Carbide mirrors

• Silicon mirrors

ULE® mirrors

• Zerodur® mirrors


ZYGO has a long tradition of manufacturing custom-made optical mirrors for a wide variety of applications, including, but not limited to:

EUV mirrors

• Lightweighted mirrors

• Space mirrors

Stage Components for lithographic steppers

• X-ray mirrors


Medical/Life Sciences

Industrial OEM

• Intelligence, surveillance & reconnaissance

In addition to ULE® mirrors, ZYGO has a wide range of optical manufacturing capabilities, such as:

• Multi-axis CNC machining & Single-Point Diamond Turning (SPDT)

• A large installed base of very large full aperture polishing process including many multi-meter class polishers

• Extensive experience in key sub-aperture finishing processes such as Computer Controlled Optical Surfacing (CCOS), Ion Beam Finishing (IBF) and Magneto-Rheological Finishing (MRF), through a variety of commercially available and custom made equipment

• Large coating capabilities and capacity

• Extensive cleaning (included automated) and inspection stations

• A wide range of metrology capabilities to characterize components across their entire Power-Spectral Density, with interferometers as large as 32" in diameter, and a wide range of state-of-the-art custom-made equipment.

Inquiry/Quote Form – Optical Mirrors
Please use the form below to tell us about the ULE® mirror you need, or ask questions about any of ZYGO's optical products, services, or capabilities. You may send any additional information, including specifications and/or prints, to:

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If you experience any difficulty submitting this form, please contact:
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Contact ZYGO's Optics business segment at 800-ZYGO-NOW.