Optics Business Segment
Optical Components Group
Markets & Applications
Optical Components Group Aspheres Extreme Precision Optics Super Finishing Optical Windows High Fluence Products Transmission Spheres & Flats Precision Reference Surfaces Optical Mirrors Corner Cube Retroreflectors High Precision Prisms Spherical Optics Thin Plate Optics Glass & Ceramic Machining Semiconductor Stage Components Coatings
Precision Reference Surfaces
• Flatness better than λ/40.
• Surface Roughness < 1nm.
• Sizes up to 32" can be measured at full aperture.
In addition to reference and transmission flats, ZYGO manufactures oil on plates for material qualification. Our large polishing machines allow us to manufacture not only round optics to over a meter in diameter, but in addition we supply reference bar mirrors for use in semiconductor manufacturing, or wherever the most precise measurements are required.
Inquiry/Quote Form – Precision Reference SurfacesPlease use this form to tell us about your Precision Reference Surface needs, or any of ZYGO's optical products, services, or capabilities. You may send any additional information, including specifications and/or prints, to:
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Contact ZYGO's Optics business segment at 800-ZYGO-NOW.