Optical Flats

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Optical Flats

Optical Flats
Key Features

• Flatness better than λ/40.

• Surface Roughness < 1nm.

• Sizes up to 32" can be measured at full aperture.

As the world leader in metrology ZYGO is uniquely suited to supply optical flats for high precision reference and transmission elements. Our state-of-the-art interferometers, teamed with our proprietary polishing capabilities, keep ZYGO in the forefront in the manufacture of optical flats and other reference optics.

In addition to reference and transmission flats, ZYGO manufactures oil-on plates for material qualification. Our large polishing machines allow us to manufacture not only round optics to over a meter in diameter, but in addition we supply reference bar mirrors for use in semiconductor manufacturing, or wherever the most precise measurements are required.


ZYGO can fabricate optical flats ranging in size from a few millimeters to greater than 1 meter.


ZYGO has developed a wide range of manufacturing processes to accommodate optical flats operating in the infrared (IR), visible, and ultra-violet (UV) parts of the spectrum. Similarly, ZYGO has experience with multi-spectral applications, combining IR and visible. Optical flats can be provided with or without thin film coatings


ZYGO has the capability to process a wide range of materials for precision optical flats, including, but not limited to:

Cleartran (water-clear Zinc Sulfide - ZnS)


• Glass (fused silica, BK7, etc.)

Sapphire windows (various crystal orientations)


Zinc (ZnSe) windows

Inquiry/Quote Form – Precision Reference Surfaces
Please use this form to tell us about your Precision Reference Surface needs, or any of ZYGO's optical products, services, or capabilities. You may send any additional information, including specifications and/or prints, to:

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Contact ZYGO's Optics business segment at 800-ZYGO-NOW.