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Extreme Precision Optics Group Richmond, CA

Zygo's Extreme Precision Optics Group in Richmond, California, fabricates world-class aspheric and spherical surfaces, precision machined structures, and ultra-high precision optical assemblies, serving the Defense & Aerospace, Life Sciences, and Semiconductor markets.

With over 20 engineers, the EPO group has a distinguished heritage that has ranged from the repair of the Hubble Space Telescope to the development of sub-nanometer precision EUV optics used in today's most demanding lithographic systems. Whether it's development of a Scope of Work, building a prototype system, redesigning for improved performance, Zygo is ready to take on your most demanding optical challenges.

Aspheric Surface Fabrication

• Sizes to 500 mm

• Materials: Zerodur, ULE, Glass, Ceramics, Si, CaF2

• Accuracy to λ/5000 RMS @ 633 nm

• Off-axis mirrors without parent fabrication

• Technologies:
›› Computer Controlled Optical Surfacing
›› Ion Beam Figuring
›› Precision optical & CMM metrology

Computer Controlled Optical Surfacing

• Aspheres & precision sphere, flats, cylinders

• Can achieve:
›› 1 nm RMS surface figure
›› 0.2 nm RMS surface roughness (glass)

• Configurable for glass, CaF2, Zerodur, ULE, SiC, Si, other materials and a wide range of part geometries

• Scalable for optics beyond 1.5 meters

• Employs proprietary Computer Controlled Optical Surfacing (CCOS) technology

Ion Beam Figuring (IBF)

100 mm flat, before and after one IBF iteration

Ion Beam Finishing

This proprietary technology employs an Argon ion stream in a vacuum to locally "polish" aspherical, spherical and flat optical surfaces. Data from optical metrology is coupled with CCOS software to locally correct surface errors.

IBF offers significant advantages:

• Achieves surface figure of less than 0.25 nm RMS (λ/2500 @ 633 nm)

• Insensitive to edge boundary conditions

• Works on delicate and/or easily deformed surfaces such as ultra lightweight substrates (no print through)

• Can be applied to surface geometries that are not accessible to conventional polishing tools

• Applicable to a wide range of materials including Zerodur, ULE, glass, ceramic, Si, CaF2

• Can not scratch surfaces

Precision Glass Machining

• 5-axis ultrasonic CNC machining of glass and ceramic material; 3 to 5 times faster than traditional CNC

• 3- & 4-axis conventional CNC glass machining

• Post machine hydrofluoric acid-etching

• 5 µm tolerances typical;
2 µm on key features post-acid etch

• Sizes to 750 mm

Abrasive Machining

• Process includes two main elements:
›› Masking - a photolithographic technique
›› Machining - a CNC mill with an abrasive power unit

• Applications include fabrication of flexible clamp membranes for reticle chucks, and patterning wafer table surfaces

Precision Glass Assembly

• Class 10000 and Class 100 assembly areas

• Custom designed proprietary tooling

• Glass-to-glass and glass-to-metal bonding

• Tolerances:
›› 10 µm position
›› 1 µm parallelism

Inquiry/Quote Form – Extreme Precision Optics
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Contact ZYGO Optical Systems Division at 800-ZYGO-NOW.
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