Extreme Precision Optics Group Richmond, CA

With over 20 engineers, the EPO group has a distinguished heritage that has ranged from the repair of the Hubble Space Telescope to the development of sub-nanometer precision EUV optics used in today's most demanding lithographic systems. Whether it's development of a Scope of Work, building a prototype system, redesigning for improved performance, Zygo is ready to take on your most demanding optical challenges.

Aspheric Surface Fabrication

• Sizes to 500 mm

• Materials: Zerodur, ULE, Glass, Ceramics, Si, CaF2

• Accuracy to λ/5000 RMS @ 633 nm

• Off-axis mirrors without parent fabrication

• Technologies:
›› Computer Controlled Optical Surfacing
›› Ion Beam Figuring
›› Precision optical & CMM metrology

Computer Controlled Optical Surfacing

• Aspheres & precision sphere, flats, cylinders

• Can achieve:
›› 1 nm RMS surface figure
›› 0.2 nm RMS surface roughness (glass)

• Configurable for glass, CaF2, Zerodur, ULE, SiC, Si, other materials and a wide range of part geometries

• Scalable for optics beyond 1.5 meters

• Employs proprietary Computer Controlled Optical Surfacing (CCOS) technology

Ion Beam Figuring (IBF)

100 mm flat, before and after one IBF iteration

IBF offers significant advantages:

• Achieves surface figure of less than 0.25 nm RMS (λ/2500 @ 633 nm)

• Insensitive to edge boundary conditions

• Works on delicate and/or easily deformed surfaces such as ultra lightweight substrates (no print through)

• Can be applied to surface geometries that are not accessible to conventional polishing tools

• Applicable to a wide range of materials including Zerodur, ULE, glass, ceramic, Si, CaF2

• Can not scratch surfaces

Precision Glass Machining

• 5-axis ultrasonic CNC machining of glass and ceramic material; 3 to 5 times faster than traditional CNC

• 3- & 4-axis conventional CNC glass machining

• Post machine hydrofluoric acid-etching

• 5 µm tolerances typical;
2 µm on key features post-acid etch

• Sizes to 750 mm

Abrasive Machining

• Process includes two main elements:
›› Masking - a photolithographic technique
›› Machining - a CNC mill with an abrasive power unit

• Applications include fabrication of flexible clamp membranes for reticle chucks, and patterning wafer table surfaces

Precision Glass Assembly

• Class 10000 and Class 100 assembly areas

• Custom designed proprietary tooling

• Glass-to-glass and glass-to-metal bonding

• Tolerances:
›› 10 µm position
›› 1 µm parallelism

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