Optical Systems Division Extreme Precision Optics Group Optical Components Group Electro-Optics Group Markets & Applications Support Contact

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Semiconductor

Semiconductor Applications

• DUV – VIS objectives

• Illumination systems

• Beam expanders

• Projection lenses

• High precision reference mirrors

• Monolithic glass stage structures

• Polarizers

• Thin plate fused silica optics

• Waveplates

Zygo Optical Systems Division has a long, rich history in supplying the semiconductor industry with high precision optical components and optical assemblies.

Our Tier 1 optical fabrication facility in Connecticut incorporates proprietary manufacturing and metrology technologies to produce high precision optical components used in many semiconductor applications including lithography, inspection, memory repair, and more.

Our Electro-Optics Group focuses on high precision, complex optical assemblies incorporating a variety of materials including CaF2 and fused silica.

The Optical Systems Division also benefits greatly from its close relationship with the Metrology Solutions Division when customized metrology solutions are required to optimize assembly time in production or quantify performance on a completed product.

From precision reference surfaces to deep UV objectives to maskless projection lenses, Zygo Optical Systems Division can help you achieve your performance goals.

Inquiry Form – Semiconductor Markets & Applications
Please use the form below to contact us with any questions you have regarding Zygo Optical Systems Division's Semiconductor Markets & Applications.

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Contact ZYGO Optical Systems Division at 800-ZYGO-NOW.
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