AFC extends the functionality of ZYGO's single sensor, noncontact, and fully automated wafer metrology products by adding ellipsometric film thickness and optical characteristic measurement capability. Presently, chipmakers and thin film head manufacturers use multiple tools to address process control of topography and thickness of complex film stacks. ZYGO technologists have addressed the challenges of thin film effects and material dispersion by integrating AFC into its single sensor platforms. The combination of sub-angstrom topography measurement with high resolution ellipsometric film metrology provides ZYGO semiconductor customers with a means to make accurate measurements and maintain control of their processes. AFC delivers multi-angle, multi-wavelength ellipsometric film thickness metrology with an industry-leading small spot size. This provides the additional benefit of allowing customers to utilize smaller test targets for production monitoring at the 32nm process node and beyond, thereby allowing improvement in both process yield and chip density.

"The introduction of Advanced Film Capability is a significant technology milestone for ZYGO. AFC opens up new opportunities for ZYGO's noncontact optical metrology," comments Michael Darwin, ZYGO's Vice President, Semiconductor Solutions Business Unit. "Customers want low cost-of-ownership, nondestructive process control, and in-line metrology equipment designed for high volume production. AFC not only provides the industry's leading edge small spot ellipsometer, but also enhances surface topography beyond traditional approaches."

Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated sales, orders, market acceptance, and growth rates, market opportunities, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on timing and market acceptance of new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, investment portfolio returns, and fluctuations in our stock price. Zygo Corporation undertakes no obligation to publicly update or revise forward-looking statements to reflect events or circumstances after the date of this news release. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2007.

 
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SOURCE: Zygo Corporation

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