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News Release
February 16, 1999


Newbury Park, CA - (February 16, 1999) Zygo Corporation, a world leader in interferometric measuring equipment, announces the introduction of the ZFM 1000 Laser Auto Focus Module. A new product for ZYGO, the ZFM 1000 is a natural derivative of ZYGO's laser and microscope expertise. The ZFM 1000 will be sold through dealers as a stand alone item that can be fit to existing microscopes and inspection systems. Additionally, it will become a standard component on several ZYGO systems.

The ZYGO ZFM 1000 is a leap forward in laser focusing technology. The ZFM 1000 integrates precision focusing technology with computerized motion control and advanced, flexible software. The ZFM 1000 controller/microstepping driver provides extremely smooth and precise control of the drive motor. Unlike other designs, the ZFM 1000 can be programmed to move the objective to any part of the stage travel. Precision laser focusing can be accomplished over the entire Z axis length of travel. Usable focusing range is limited only by the objective. This is possible because the ZFM 1000 does not require a fine focus mechanism. The direct drive system allows very rapid positioning of the objective anywhere within the axis of travel and eliminates the problems associated with friction drive systems.

André Perrin, Vision Systems Product Manager, said, "We joined today's powerful computing technology with ZYGO's innovative optical design to overcome a number of the weaknesses found in currently available auto focus systems." He continued, "... this improved laser auto focus will strengthen the performance of many of our systems."

The ZFM 1000 is available with WindowsNT ActiveX control software and can retrofitted to virtually any microscope to provide real time focusing. Applications include automated and manual operations in the semiconductor, data storage, and other high-tech manufacturing industries. Zygo Corporation designs, develops, manufactures, and markets high performance measurement and yield improvement instruments, systems, and accessories used in high technology industries. The Company is headquartered in Middlefield, Connecticut, and also has operations in Asslar, Germany; Longmont, Colorado; and in Newbury Park and Sunnyvale, California. ZYGO is traded on the Nasdaq National Market under the symbol ZIGO. Additional information on the Company is available on the Internet at

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

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