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News Release
October 27, 1999

ZYGO CORPORATION INTRODUCES AUTOMATIC RETICLE INSPECTION AND HANDLING STATION

MIDDLEFIELD, CONNECTICUT (October 27, 1999)......Zygo Corporation (NASDAQ:ZIGO) today introduced a new automatic reticle handling system at Semicon Southwest in Austin, Texas. The system is designed to handle, inspect, and clean reticles before automatic insertion into a stepper cassette or pod.

Initial orders for the system, designed to reduce reticle and pell damage, include microprocessor and IC manufacturers in the US, Europe, the Middle-East, and Asia. Multiple units have been successfully installed to date and are surpassing expectations in the area of throughput and increased operating efficiency.

"This product introduction represents the next generation of automation handling, inspection, and metrology solutions that we have developed to meet specific customer requirements. We are pleased with the market acceptance this new tool has received and the recent interest shown at the tool's Semicon introduction," said Bruce Robinson, ZYGO president.

Zygo Corporation designs, develops, manufactures, and markets high performance measurement and yield improvement instruments, systems, and accessories used in high technology industries. The Company is headquartered in Middlefield, Connecticut, and also has operations in Asslar, Germany; Longmont, Colorado; and in Newbury Park, Sunnyvale, and Simi Valley, California.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

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