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News Release
March 14, 2000


MIDDLEFIELD, CONNECTICUT March 14, 2000…..Zygo Corporation, a world leader in interferometric measuring equipment, announces orders for multiple ZMI 2000 Displacement Measuring Interferometer Systems for stage position feedback on a next generation lithography tool. ZYGO will supply a complete solution package made up of standard and custom components to a lithography tool manufacturer for delivery in the next 12 months, with initial orders exceeding two million dollars for shipments starting in the fourth quarter of fiscal year 2000. This OEM win will result in increased revenues for ZYGO as the next generation tool becomes a greater part of the lithography tool manufacturer's product mix.

The ZMI 2000 DMI enhances lithography tool performance by improving throughput, overlay, and linewidth control. The ZMI 2000 DMI can track motions at higher resolution, at higher velocities, and at an improved level of multi-axis synchronization thereby enhance stage position control by improving the dynamics of the reticle stage and wafer stage synchronization and position repeatability.

"This growing OEM relationship is a clear demonstration of how Zygo Corporation can package its technical strengths and systems integration expertise to provide the customer with a complete set of solutions," comments Daniel Hobbs, product marketing manager for ZMI Systems.

"We continue to enhance the ZMI product line to strengthen our OEM solutions toolbox," said Bruce Robinson, president and chief executive officer. "With the continued expansion of the engineering team supporting ZMI Systems, we are able to broaden our position as a high end supplier and will continue to accelerate our leadership position."

Zygo Corporation designs, develops, manufactures, and markets high performance measurement and yield improvement instruments, custom automation systems, and accessories used in high technology industries. The Company is headquartered in Middlefield, Connecticut, and also has operations in Asslar, Germany; Longmont, Colorado; and sales offices throughout the world. ZYGO is traded on the Nasdaq National Market under the symbol ZIGO. Additional information on the Company is available on the Internet at

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

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