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News Release
September 5, 2000


MIDDLEFIELD, CONNECTICUT September 5, 2000…..ZYGO TeraOptix (NASDAQ:ZIGO), today announced the MicroLUPIÔ metrology system. The MicroLUPIÔ is an advanced surface metrology system for manufacturers and developers of micro-optical components and devices. The MicroLUPIÔ provides automated, rapid, and precise 3D surface shape analysis of discrete or array-based micro-optical components. Micro-optical components are key parts of fiber-optic couplers and optical switches used in DWDMs. Orders for multiple units have been received and installed at leading manufacturers of optical components and systems for the telecommunications industry.

The automated, precise metrology of the MicroLUPIä enables manufacturers to achieve process control on critical components, reducing production costs and increasing yields. Reduced costs and increased yields are paramount as the industry shifts to high-volume production to meet the demand for increased bandwidth and transmission capacity.

The MicroLUPIä is a fully integrated, micro-aperture, phase-shifting interferometer system that employs a unique combination of optical technology and multi-axis automation. This combination enables rapid, noncontact 3D surface measurement and analysis of both highly curved and flat components. Each measurement maps the full surface of the component and reports critical surface parameters such as shape deviation, radius of curvature, and wavefront error and does so typically in less than five seconds per part.

"The MicroLUPIä is a significant and complementary addition to our expanding line of metrology products and services that we now offer to our growing list of telecommunications-based customers. We are also very pleased at the early acceptance and success this innovative product has received from the marketplace. The unique attributes and capabilities of the MicroLUPIä address the demanding optics metrology needs and requirements of current and next generation components and devices," stated John Roth, product marketing manager.

Zygo Corporation (NASDAQ; ZIGO), headquartered in Middlefield, Connecticut, is a leading worldwide developer and supplier of high precision optics, optical, and fiber optic assemblies, high performance metrology instruments, and automation for the telecommunications, semiconductor, data storage, and industrial markets. See ZYGO's web site at for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's (ZYGO's) current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

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