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News Release
December 5, 2001

ZYGO Expands ZMI 500 Series of Stage Metrology Solutions
MIDDLEFIELD, Conn., Dec 5, 2001 (BUSINESS WIRE) -- Zygo Corporation (NASDAQ: ZIGO) Zygo Corporation, the technology leader in Displacement Measuring Interferometry, announced today the introduction of the ZMI 501 measurement electronics at Semicon Japan 2001.

The ZMI 501 measurement electronics are designed to provide the step resolution required to meet the stage metrology needs for next generation semiconductor test instrumentation.

"Displacement measuring interferometers improve stage position accuracy by measuring at the plane of interest and eliminating geometrical errors. The ZMI 501 builds on the success of ZYGO's ZMI 500 series of DMIs as an OEM solution by providing enhanced system accuracy and throughput," stated Dan Musinski, product manager for ZYGO's Displacement Measuring Interferometers. "The ZMI 501 electronics offer the resolution, velocity, and flexible interface options required by our customer's that are developing next generation semiconductor instrumentation."

The ZMI 501 electronics is an enhancement to ZYGO's successful ZMI 500 series of displacement interferometer products. The ZMI 501 has selectable linear position resolution to the nanometer level and the ability to track high target velocities. For ease of integration the ZMI 501 measurement electronics offers the metrology data in multiple formats. When combined with a ZYGO stage mirror a ZMI 500 series Displacement Measuring Interferometer system provides a complete Stage Metrology Solution.

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical, and fiber optic assemblies, high performance metrology instruments, and automation for the telecommunications, semiconductor, and industrial markets. See ZYGO's web site at for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

CONTACT:          Zygo Corporation
                  Dan Musinski
                  Product Manager, Displacement Measuring Interferometers
                  Voice: 860-704-5136
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