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News Release
December 6, 2001

ZYGO Enhances Highest Performance Stage Metrology Solution
MIDDLEFIELD, Conn., Dec 6, 2001 (BUSINESS WIRE) -- Zygo Corporation (NASDAQ: ZIGO) Zygo Corporation, the technology leader in Displacement Measuring Interferometry, announced today the introduction of the ZMI 4004 measurement electronics at Semicon Japan 2001.

The ZMI 4004 is designed to meet the most demanding stage metrology requirements for Next Generation Lithography (NGL) and Semiconductor test equipment.

The International Roadmap for Semiconductors (ITRS) highlights overlay as one of the key challenging specifications for NGL development. The performance of the ZMI 4004 provides the ability to meet the overlay requirements by offering unmatched linear resolution, velocity and synchronization capabilities.

Bruce Robinson, ZYGO's president and CEO states: "As lithography trends continue to demand smaller feature sizes, higher throughputs and improved accuracy the performance of the ZMI 4004 measurement electronics will be required. The introduction of the ZMI 4004 gives our customers the flexibility to design their NGL and test equipment around a product that meets their demanding stage metrology requirements."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical, and fiber optic assemblies, high performance metrology instruments, and automation for the telecommunications, semiconductor, and industrial markets. See ZYGO's web site at for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

CONTACT:          Zygo Corporation, Middlefield
                  Dan Musinski, 860/704-5136
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