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News Release
July 18, 2002

ZYGO Introduces New Verifire Interferometer Line
MIDDLEFIELD, Conn., Jul 18, 2002 (BUSINESS WIRE) -- Zygo Corporation (Nasdaq:ZIGO) today announced the introduction of its next-generation line of surface and wavefront measuring interferometers, the Verifire™ AT & MST models.

Complementing ZYGO's current industry-standard GPI™ interferometers, the Verifire line employs new patent-pending technologies that provide optical manufacturers with unique measurement and analysis capabilities.

The Verifire AT (Advanced Technology), with its patent-pending Ring of Fire™ illumination system, suppresses the coherent artifacts that cause spurious fringe patterns, thereby providing unrivaled measurement performance. The Verifire AT is the tool of choice for applications requiring the highest performance in a commercial interferometer, such as measuring the surfaces of lithography lenses used in the manufacture of semiconductors.

The Verifire MST (Multiple Surface Transform) combines wavelength-shifting interferometry with ZYGO's new patent-pending data acquisition technology to provide time-saving simultaneous measurement of parallel plate surfaces, thickness variation, and homogeneity - requiring no specialized set ups or part preparation. These capabilities open up new measurement applications for photomasks, etalons, filters and prismatic optical components critical to semiconductor manufacturing and high-performance optical systems. The Verifire MST also has the unique ability to measure the linear component of homogeneity, which reduces assembly time of certain optical systems.

Product Manager Maria Robinson noted, "Our customers are very excited about the capabilities of the Verifire line. Its new technologies redefine the standards for measurement speed and accuracy, and expand the range of applications that can benefit from optical interferometry. The Verifire is helping optical manufacturers reduce production costs and increase product quality."

ZYGO will showcase the Verifire AT and have information available about the Verifire MST at the SEMICON West 2002 exhibition at the Moscone Convention Center in San Francisco, California, July 22-24. ZYGO's booth is located in the South Hall, No. 226.

Zygo Corporation (Nasdaq:ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical assemblies, high performance metrology instruments, and automation for the semiconductor, industrial, and telecommunications markets. See ZYGO's web site at for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risks and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

CONTACT:          Zygo Corporation, Middlefield
                  Maria Robinson, 860/347-8506
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