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News Release
March 3, 2003

ZYGO Receives Contract Award for Opto-Mechanical Assemblies from Lawrence Livermore National Laboratory
MIDDLEFIELD, Conn., Mar 3, 2003 (BUSINESS WIRE) -- Zygo Corporation (NASDAQ:ZIGO) has received a contract award for 94 precision opto-mechanical assemblies from the University of California managed, Lawrence Livermore National Laboratory (LLNL).

These assemblies are to be installed in the National Ignition Facility (NIF), the world's largest laser system, being constructed at LLNL for the study of nuclear weapons physics and energy production by controlled thermonuclear fusion. The contract, with options covering multiple fiscal years, has a potential value of $8.6 million. The work is anticipated to be performed at ZYGO's Optical Assembly Center, located in Tucson, Arizona, with optical components supplied by ZYGO's Optical Manufacturing Center, located in Middlefield, Connecticut.

"This is the second contract awarded to ZYGO by LLNL in the past year for opto-mechanical assemblies," said Peter Mumola, Vice President for Optics at Zygo Corporation. Earlier this year, ZYGO was awarded a contract for 192 vacuum relay telescopes with a potential value of $7.66 million. This new contract for Transport Spatial Filter Diagnostic Tower Platform Assemblies builds upon ZYGO's 33 years of experience as a leading supplier of precision optics and optical measurement systems.

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical assemblies, high performance metrology instruments, and automation for the semiconductor and industrial markets. See ZYGO's web site at for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21 E of the Securities and Exchange Act of 1934. as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risk and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

CONTACT:          Zygo Corporation, Middlefield
                  Peter Mumola, 860/347-8506
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