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News Release
August 26, 2003

Zygo Corporation Receives Six Million Dollar Contract for Optical Components

MIDDLEFIELD, Conn., Aug 26, 2003 (BUSINESS WIRE) -- ZYGO Corporation (NASDAQ: ZIGO) announced today that it has received a contract for producing high quality optics to be used in next generation semiconductor equipment. The contract, valued at $6 million, runs from 2004 through April 2006. The work will be performed at ZYGO's optical manufacturing center, located in Middlefield, Connecticut.

"ZYGO continues to expand the number of key components produced and supplied to the semiconductor capital equipment industry," said Bruce Robinson, president and CEO at ZYGO. "These optics join a growing suite of products available from ZYGO to enhance the performance of lithography tools."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical assemblies, high performance metrology instruments, and automation for the semiconductor and industrial markets. See ZYGO's web site at for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21 E of the Securities and Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risk and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.

SOURCE: Zygo Corporation

Zygo Corporation
J. Bruce Robinson, 860-704-5109
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