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News Release
September 12, 2005

ZYGO Announces Opening of Semiconductor Process Metrology Group in Oregon

MIDDLEFIELD, CT, Sep 12, 2005 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO), a leading worldwide optical metrology supplier, today announced the official opening of a new facility in Beaverton, Oregon. The facility will house the Company's recently formed semiconductor process metrology group under Dr. Michael J. Darwin.

Prior to joining ZYGO, Dr. Darwin held the positions of Process Metrology Group Leader at Intel's Portland Technology Development center in Hillsboro, Oregon, and Director of Technology Development at Rudolph Technologies in Flanders, New Jersey. During his tenure at Intel, Dr. Darwin participated in the creation of Intel's 5-generation roadmap for thin film metrology, and managed numerous 300mm metrology tool selections for Intel's development and high volume manufacturing lines. He and his team will lead ZYGO's semiconductor process control product development activities, and provide worldwide applications support.

Bruce Robinson, ZYGO's Chairman and Chief Executive Officer, stated "We recently launched a major strategic initiative to bring our world class optical metrology and detection technology to the semiconductor process control industry. Our new Oregon office, under Dr. Darwin's leadership, is a key part of that strategy, and it is a measure of our long-term commitment to the industry and our key customers."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's Web site at for additional information.

All statements other than statements of historical fact included in this news release regarding the Company's financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending in the semiconductor industry, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on new product development, rapid technological and market change, international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and changes in expected costs of discontinued operations. Further information on potential factors that could affect Zygo Corporation's business is described in the Company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended June 30, 2005.

Robert J. Stoner
Vice President, Metrology Business Unit
Voice: 860-704-3945
Contact via

SOURCE: Zygo Corporation

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