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News Release
May 4, 2006

Zygo Corporation Ships First Front End Semiconductor Process Metrology Tool

MIDDLEFIELD, CT, May 04, 2006 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO), a leading worldwide optical metrology supplier, today announced the first shipment of its new front end semiconductor metrology tool, the Z3D 7000™, to a leading tier one semiconductor manufacturer.

The Z3D 7000™ optical metrology tool performs high-resolution surface topography measurements on bare and patterned 200mm and 300mm semiconductor wafers. It provides high measurement precision at throughputs far exceeding those achievable with existing mechanical profiling techniques, such as atomic force microscopy. The tool has been designed to meet the growing need for in-line etch, deposition, and planarization process metrology 45nm node and beyond. It is equipped with SEMI(R) compliant automation, ISO Class 2 certified clean hardware, and meets all ergonomic and safety certifications needed for production line equipment.

Robert Stoner, ZYGO's Vice President, Metrology, made the following comment, "This is a significant shipment for ZYGO. We have listened carefully to some of the most influential voices in the semiconductor industry, and responded rapidly to their emerging process control needs with a powerful combination of proprietary ZYGO technologies, and a world-class platform. Our Semiconductor Group, which we formed less than a year ago, has quickly established itself, and we are optimistic about its future new semiconductor metrology products. The Z3D 7000™ is now a reality in the marketplace."

Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated growth rates, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on and timing of new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and stock price. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2005.

For Further Information Call:
Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice: 860-704-3955
Contact via

SOURCE: Zygo Corporation

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