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News Release
June 14, 2007

Zygo Corporation Introduces Semiconductor Tool for Litho and Etch Metrology
MIDDLEFIELD, CT, Jun 14, 2007 (MARKET WIRE via COMTEX News Network) -- Zygo Corporation (NASDAQ: ZIGO) today announced its new in-fab semiconductor metrology system, the UniFire-7900™, designed to meet back end of the line litho and etch metrology challenges of semiconductor manufacturing processes at the 32nm node and beyond.

The UniFire-7900™ optical metrology tool delivers high precision three-dimensional information that can be used for surface topography, critical dimension, overlay/registration, and film thickness metrology in one small footprint. This single, multi-functional tool will allow semiconductor manufacturers to consolidate their metrology tools in their litho and etch modules, saving valuable clean room real estate and reducing overall metrology costs.

Michael Darwin, ZYGO's Vice President, Semiconductor Solutions Business Unit, made the following comment, "The UniFire-7900™ builds on the success of our first two in-fab, fully automated metrology solutions, the Z3D-7000™ and Z3D-7200™. With the addition of the UniFire-7900™ to ZYGO's in-fab semiconductor product portfolio, ZYGO is now positioned to address customer metrology needs in the front end of line, back end of line, and wafer fabrication. Customers will use the UniFire-7900™ to reduce their capital investment in metrology while taking advantage of its leading edge technology. We will continue to work closely with our customers on developing world-class optical metrology systems that meet the current and future demands of the semiconductor industry."

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets. See ZYGO's web site at for additional information.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated growth rates, market opportunities, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on and timing of new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, and fluctuations in our stock price. Zygo Corporation undertakes no obligation to publicly update or revise forward-looking statements to reflect events or circumstances after the date of this news release. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2006.

For Further Information Call:
Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice: 860-704-3955
Email Contact

SOURCE: Zygo Corporation
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