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News Release
August 6, 2008

ZYGO Releases LIFTS™ Stage Solution for Flat Panel Metrology and Inspection

MIDDLEFIELD, CT--(Marketwire - August 6, 2008) - Zygo Corporation (NASDAQ: ZIGO) announced today that it is releasing a new stage metrology system trade named LIFTS™ (LCD Interferometric Floating glass Transport System). This new product provides a new glass handling solution for achieving precision metrology and inspection on large stage LCD panels.

ZYGO designed the LIFTS™ system to meet the current and future LCD technology roadmap for glass sizes of G8+ and larger. This new platform addresses handling problems with glass greater than 2000mm, generated by the fab environment. These problems manifest themselves in the form of static electricity and vibration, creating problems in achieving in-line inspection and metrology critical to maintaining fab yields.

ZYGO-controlled air conveyors and precision air chucks move the glass in and out of the metrology tool, maintaining the glass on an air cushion at all times. The resulting system provides faster tool processing times in addition to superior metrology. The tool is also capable of maintaining its specified performance in a VC-B fab environment, critical when accessing fab construction costs.

"The introduction of LIFTS™ is a significant technology advancement for ZYGO," said Brian Monti, Senior Vice President and General Manager of the ZYGO Display Solutions Division. "The LIFTS™ platform not only provides cost effective solutions for the next generation LCD fabs, but it also permits new inspection and metrology solutions to be created to further enhance fab yield and throughput objectives. We are delighted with the market acceptance of this new ZYGO product platform."

ZYGO also disclosed that the LIFTS™ platform was part of previously announced G8+ orders. Applications for the new platform included Color Filter and Thin Film Transistor topography, critical dimension metrology, and inspection.

Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets.

All statements other than statements of historical fact included in this news release regarding our financial position, business strategy, plans, anticipated sales, orders, market acceptance, and growth rates, market opportunities, and objectives of management of the Company for future operations are forward-looking statements. Forward-looking statements are intended to provide management's current expectations or plans for the future operating and financial performance of the Company based upon information currently available and assumptions currently believed to be valid. Forward-looking statements can be identified by the use of words such as "anticipate," "believe," "estimate," "expect," "intend," "plans," "strategy," "project," and other words of similar meaning in connection with a discussion of future operating or financial performance. Actual results could differ materially from those contemplated by the forward-looking statements as a result of certain factors. Among the important factors that could cause actual events to differ materially from those in the forward-looking statements are fluctuations in capital spending of our customers, fluctuations in net sales to our major customer, manufacturing and supplier risks, dependence on timing and market acceptance of new product development, rapid technological and market change, risks in international operations, dependence on proprietary technology and key personnel, length of the sales cycle, environmental regulations, investment portfolio returns, and fluctuations in our stock price. Zygo Corporation undertakes no obligation to publicly update or revise forward-looking statements to reflect events or circumstances after the date of this news release. Further information on potential factors that could affect Zygo Corporation's business is described in our reports on file with the Securities and Exchange Commission, including our Form 10-K for the fiscal year ended June 30, 2007.

For Further Information Call:
Walter A. Shephard
Vice President Finance, CFO, and Treasurer
Voice: 860-704-3955

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