|ZYGO Releases LIFTS™ Stage Solution for Flat Panel Metrology and Inspection|
MIDDLEFIELD, CT--(Marketwire - August 6, 2008) - Zygo Corporation (NASDAQ: ZIGO) announced today that it is releasing a new stage metrology system trade named LIFTS™ (LCD Interferometric Floating glass Transport System). This new product provides a new glass handling solution for achieving precision metrology and inspection on large stage LCD panels.
ZYGO designed the LIFTS™ system to meet the current and future LCD technology roadmap for glass sizes of G8+ and larger. This new platform addresses handling problems with glass greater than 2000mm, generated by the fab environment. These problems manifest themselves in the form of static electricity and vibration, creating problems in achieving in-line inspection and metrology critical to maintaining fab yields.
ZYGO-controlled air conveyors and precision air chucks move the glass in and out of the metrology tool, maintaining the glass on an air cushion at all times. The resulting system provides faster tool processing times in addition to superior metrology. The tool is also capable of maintaining its specified performance in a VC-B fab environment, critical when accessing fab construction costs.
"The introduction of LIFTS™ is a significant technology advancement for ZYGO," said Brian Monti, Senior Vice President and General Manager of the ZYGO Display Solutions Division. "The LIFTS™ platform not only provides cost effective solutions for the next generation LCD fabs, but it also permits new inspection and metrology solutions to be created to further enhance fab yield and throughput objectives. We are delighted with the market acceptance of this new ZYGO product platform."
ZYGO also disclosed that the LIFTS™ platform was part of previously announced G8+ orders. Applications for the new platform included Color Filter and Thin Film Transistor topography, critical dimension metrology, and inspection.
Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, serving customers in the semiconductor capital equipment and industrial markets.
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